Soft films on hard substrates — nanoindentation of tungsten films on sapphire substrates
- 31 December 2001
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 319-321, 898-901
- https://doi.org/10.1016/s0921-5093(01)01076-0
Abstract
No abstract availableKeywords
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