'Smart integrated circuit processing
- 1 January 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Semiconductor Manufacturing
- Vol. 2 (4) , 151-158
- https://doi.org/10.1109/66.44619
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Statistical equipment modeling for VLSI manufacturing: an application for LPCVDIEEE Transactions on Semiconductor Manufacturing, 1990
- Monitoring and diagnosis of plasma etch processesIEEE Transactions on Semiconductor Manufacturing, 1988
- The future of automation for high-volume Wafer fabrication and ASIC manufacturingProceedings of the IEEE, 1986
- A novel borophosphosilicate glass processPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1985