Surface modification with gas cluster ion beams
- 1 June 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 79 (1-4) , 223-226
- https://doi.org/10.1016/0168-583x(93)95330-8
Abstract
No abstract availableKeywords
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- Energetic cluster impacts on thin gold and tantalum filmsThe Journal of Physical Chemistry, 1986
- Larger cluster ion impact phenomenaChemical Reviews, 1986
- Strahlen aus kondensierten Atomen und Molekeln im HochvakuumThe European Physical Journal A, 1956