Diamond-like carbon films deposited in a dual microwave-radio-frequency plasma
- 15 January 1992
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 11 (1-4) , 321-324
- https://doi.org/10.1016/0921-5107(92)90233-y
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Energy fluxes in mixed microwave-r.f. plasmaThin Solid Films, 1990
- Dual microwave-r.f. plasma deposition of functional coatingsThin Solid Films, 1990
- Dual-mode microwave/radio frequency plasma deposition of dielectric thin filmsApplied Physics Letters, 1989
- Process monitoring of a-C:H plasma depositionJournal of Vacuum Science & Technology A, 1987
- Comparison of microwave and lower frequency plasmas for thin film deposition and etchingJournal of Vacuum Science & Technology A, 1985