Energy Level and Solid Solubility of Cobalt in Silicon by In-Depth Profile Measurement
- 1 June 1984
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 23 (6R) , 776-777
- https://doi.org/10.1143/jjap.23.776
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Barrier height for cobalt on siliconPhysica Status Solidi (a), 1982
- Simple ICTS Measurement MethodJapanese Journal of Applied Physics, 1982
- Solid Solubility of Cobalt in SiliconJapanese Journal of Applied Physics, 1977