An atomic-resolution atomic-force microscope implemented using an optical lever
- 1 January 1989
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 65 (1) , 164-167
- https://doi.org/10.1063/1.342563
Abstract
We present the first atomic‐resolution image of a surface obtained with an optical implementation of the atomic‐force microscope (AFM). The native oxide on silicon was imaged with atomic resolution, and ≊5‐nm resolution images of aluminum, mechanically ground iron, and corroded stainless steel were obtained. The relative merits of an optical implementation of the AFM as opposed to a tunneling implementation are discussed.This publication has 30 references indexed in Scilit:
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