A self-consistent particle model for the simulation of RF glow discharges
- 1 April 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 19 (2) , 158-162
- https://doi.org/10.1109/27.106809
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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