Epitaxial lead zirconate-titanate thin films on sapphire

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Abstract
Pb(Zr1−xTix)O3 thin films covering the whole compositional range x=0 to x=1 have been grown for the first time on the sapphire (11̄02) plane using the metalorganic chemical vapor deposition technique. The films are three-dimensionally epitaxial and exhibit single crystal properties. The structural transitions, examined by x-ray diffraction, are shifted slightly from the bulk single crystal values. Ferroelectric P-E hysteresis curves and the dielectric constant of the films were investigated using interdigitated electrodes fabricated by photolithography.