A 3-dimensional model for low-pressure chemical-vapor-deposition step coverage in trenches and circular vias
- 1 December 1991
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 70 (11) , 7137-7140
- https://doi.org/10.1063/1.349797
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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