Enhancement of elementary displaced volume with electrostatically actuated diaphragms: application to electrostatic micropumps
- 23 May 2000
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 10 (2) , 282-286
- https://doi.org/10.1088/0960-1317/10/2/330
Abstract
No abstract availableKeywords
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