Backscattering analysis of Si1−yCy layers using the 12C(4He,4He) 12C resonance at 4.265 MeV
- 1 May 1995
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 100 (1) , 125-132
- https://doi.org/10.1016/0168-583x(95)00259-6
Abstract
No abstract availableKeywords
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