Sputtered and plasma polymerized fluorocarbon films
- 1 June 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 35 (2) , L19-L21
- https://doi.org/10.1016/0040-6090(76)90267-4
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- A comparison of r.f. sputtered and plasma polymerized thin films of tetrafluoroethyleneThin Solid Films, 1975
- Fluorocarbon coatings for wear applicationsJournal of Vacuum Science and Technology, 1975
- The behaviour of perfluoropolyether and other vacuum fluids under ion and electron bombardmentNuclear Instruments and Methods, 1973
- Friction of sputtered PTFE filmsThin Solid Films, 1969