Compact 2D laser beam scanner with fan laserarray and Si micromachined microscanner

Abstract
The first demonstration of a compact 2D laser beam scanning system using a beam steering fan diode laser array and an Si surface micromachined microscanner is reported. The system is capable of reading and writing operations that detect or generate arbitrary patterns with 7 × 10 pixel resolution. The system demonstrates the viability of these new technologies for applications such as laser scanners for remote sensing and barcode scanning, multi-beam laser printers, and multi-line write 2D laser displays.