Phase Formation and Kinetic Processes in Silicide Growth.
- 1 January 1983
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 23 references indexed in Scilit:
- Growth kinetics of platinum silicideJournal of Applied Physics, 1983
- Reinvestigation of first phase nucleation in planar metal-Si reaction couplesApplied Physics Letters, 1983
- Impurity effects in molybdenum silicide formationThin Solid Films, 1982
- NiSi formation at the silicide/Si interface on the NiPt/Si systemJournal of Applied Physics, 1982
- Silicides of ruthenium and osmium: Thin film reactions, diffusion, nucleation, and stabilityJournal of Applied Physics, 1982
- Thermal stability and growth kinetics of Co2Si and CoSi in thin-film reactionsJournal of Applied Physics, 1982
- Ion-beam-induced modification of silicide formation in rare-earth metals: Er-Si and Tb-Si systemsApplied Physics Letters, 1980
- Thin Films—Interdiffusion and ReactionsJournal of the Electrochemical Society, 1979
- Phase diagrams and metal-rich silicide formationJournal of Applied Physics, 1979
- First phase nucleation in silicon–transition-metal planar interfacesApplied Physics Letters, 1976