Fabrication of 3D Metamaterial Resonators Using Self‐Aligned Membrane Projection Lithography
- 3 August 2010
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 22 (29) , 3171-3175
- https://doi.org/10.1002/adma.200904153
Abstract
No abstract availableKeywords
Funding Information
- United Stated Department of Energy’s National Nuclear Security Administration (DE-AC04-94AL85000)
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