A series solution approach to an analytical load-deflection relation for the measurement of mechanical properties of thin films
- 30 November 1999
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 9 (4) , 341-344
- https://doi.org/10.1088/0960-1317/9/4/309
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A new analytical solution for the load-deflection of square membranesJournal of Microelectromechanical Systems, 1995
- Mechanical property measurements of thin films using load-deflection of composite rectangular membranesSensors and Actuators, 1989
- Novel microstructures for the i n s i t u measurement of mechanical properties of thin filmsJournal of Applied Physics, 1987
- A technique for the determination of stress in thin filmsJournal of Vacuum Science & Technology B, 1983