Spin-On Dielectrics: Good News and Bad News!
- 1 January 1989
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Coating Films of 20B2O3·80SiO2 by the Sol‐Gel MethodJournal of the American Ceramic Society, 1987
- Preparation of High‐Silica Glasses from Colloidal Gels: III, Infrared Spectrophotometric StudiesJournal of the American Ceramic Society, 1983
- Elastic stiffness and thermal expansion coefficient of BN filmsApplied Physics Letters, 1980
- Thermal stresses and cracking resistance of dielectric films (SiN, Si3N4, and SiO2) on Si substratesJournal of Applied Physics, 1978
- Ionic Contamination and Transport of Mobile Ions in MOS StructuresJournal of the Electrochemical Society, 1971
- An investigation of instability and charge motion in metal-silicon oxide-silicon structuresIEEE Transactions on Electron Devices, 1966