10 Gbit/s high sensitivity, low-voltage-operationavalanche photodiodes with thin InAlAs multiplication layer and waveguide structure

Abstract
The development of waveguide avalanche photodiodes with a very thin 0.1 µm multiplication layer for use in high-speed, high-sensitivity, low-voltage-operation receivers is presented. A η = 76%, a GB product of 180 GHz, and a breakdown voltage Vb of 15 V were obtained. The 10 Gbit/s bit error rate measurement showed a sensitivity of –28.8 dBm (BER 10-9, PRBS 223–1), which is the highest sensitivity yet reported for APD receivers.