Channeling of ions near the silicon 〈001〉 axis
- 15 February 1985
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 46 (4) , 358-360
- https://doi.org/10.1063/1.95630
Abstract
The first experimental mapping of ion beam channels near the Si 〈001〉 axis is reported. All features are identified by theoretical plots of silicon planar channels and axial channels.Keywords
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