Temperature measurements of semiconductor devices - a review

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6 May 2004

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

No. 10652221,p. 70-80
https://doi.org/10.1109/stherm.2004.1291304

Abstract

There are numerous methods for measuring the temperature of an operating semiconductor device. The methods can be broadly placed into three generic categories: electrical, optical, and physically contacting. The fundamentals underlying each of the categories are discussed, and a review of the variety of techniques within each category is given. Some of the advantages and disadvantages as well as the spatial, time, and temperature resolution are also provided.

Keywords

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