Study of an argon magnetron discharge used for molybdenum sputtering. I. Collisional radiative model
- 1 August 1993
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 2 (3) , 127-137
- https://doi.org/10.1088/0963-0252/2/3/001
Abstract
No abstract availableKeywords
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