Study of an argon magnetron discharge used for molybdenum sputtering. II. Spectroscopic analysis and comparison with the model
- 1 August 1993
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 2 (3) , 138-144
- https://doi.org/10.1088/0963-0252/2/3/002
Abstract
For pt.I see ibid., vol.2, p.127-37 (1993). By optical emission spectroscopy the spectra of an argon magnetron discharge working with a molybdenum cathode was studied and quantitatively compared with the results of a kinetic model of the discharge. Some Ar 1 5p to 4s transitions have been particularly used for this comparison. The behavior of their intensities as functions of the discharge current and gas pressure was found to be in good agreement with the mode. The intense Mo lines emitted by the plasma are used, with help of the model, to determine Mo atom densities in the plasma. The effect of the thermalization of Mo atoms by the gas is discussed.Keywords
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