Ion Energy Distribution of KrF Laser Ablation
- 1 April 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (4B) , L524
- https://doi.org/10.1143/jjap.31.l524
Abstract
The KrF laser ablation of Al, Cu, Si, and SrTiO3 targets has been studied using an electrostatic deflection energy analyzer and a quadrupole mass filter. Beam like ions appear to accompany ablation. The average kinetic energies of Si+ and metal ions are about 45 eV and 60 eV, respectively. The energies of ions are ranked in the order of Si3. The mean ion energy of Cu+ is not affected by the laser fluence range of 2-7.5 J/cm2.Keywords
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