Precise alignment through thick wafers using an optical copying technique
- 15 March 1992
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 17 (6) , 390-392
- https://doi.org/10.1364/ol.17.000390
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 2 references indexed in Scilit:
- Planar integration of free-space optical componentsApplied Optics, 1989
- Über Die Justierung Ebener Strukturen Mittels MoiréOptica Acta: International Journal of Optics, 1976