Synthesis of Al2O3 by ion implantation of oxygen into aluminium
- 1 February 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 1 (2-3) , 258-264
- https://doi.org/10.1016/0168-583x(84)90078-8
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Sputtering measurements with the double resonator techniqueJournal of Vacuum Science and Technology, 1974
- Simultaneous Thin-Film Stress and Mass-Change Measurements Using Quartz ResonatorsJournal of Applied Physics, 1972
- Conduction in metal oxide thin films formed by oxygen ion implantationThin Solid Films, 1972
- Sputtering and Strain of Silicon by Ion ImplantationJournal of Applied Physics, 1971