Process and design considerations for surface micromachined beams for a tuneable interferometer array in silicon
- 30 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
A special surface micromachining process, using oxidized polysilicon sacrificial layer and poly-nitride/poly membranes, has been developed for realizing the monolithic integration of light modulators with silicon devices. The design and processing considerations for developing a compact micromachined silicon Fabry-Perot interferometer are presented. Initial tests have shown that these micromachined membranes represent a compact and effective light modulating method.<>Keywords
This publication has 3 references indexed in Scilit:
- A miniature Fabry-Perot interferometer fabricated using silicon micromachining techniquesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Deformable mirror device spatial light modulators and their applicability to optical neural networksApplied Optics, 1989
- Silicon Torsional Scanning MirrorIBM Journal of Research and Development, 1980