Hydrogen plasma treatment: desorption of atomic hydrogen from silicon surfaces studied by in-situ spectroscopic ellipsometry
- 1 April 1991
- journal article
- Published by Elsevier in Physica B: Condensed Matter
- Vol. 170 (1-4) , 497-502
- https://doi.org/10.1016/0921-4526(91)90165-b
Abstract
No abstract availableKeywords
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