Determination of the mechanical properties of microstructures
- 1 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3) , 750-754
- https://doi.org/10.1016/s0924-4247(97)80051-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Aging phenomena in heavily doped (p+) micromachined silicon cantilever beamsSensors and Actuators A: Physical, 1992
- Measurement of the mechanical properties of silicon microresonatorsSensors and Actuators A: Physical, 1991
- Young’s modulus measurements of thin films using micromechanicsJournal of Applied Physics, 1979