Sputtered FeHfO films with high electrical resistivity and good soft magnetic properties
- 15 May 1994
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 181-182, 1020-1024
- https://doi.org/10.1016/0921-5093(94)90792-7
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Soft Magnetic Properties of F Included Films with Metal-Metalloid Systems.Journal of the Magnetics Society of Japan, 1992
- Absolute value measurements of thin film permeability.Journal of the Magnetics Society of Japan, 1991
- The high-resistive soft magnetic amorphous films consisting of cobalt, iron, boron, silicon, and oxygen, utilized for video head devicesJournal of Applied Physics, 1990
- Structures and characteristics of planar transformers.Journal of the Magnetics Society of Japan, 1988
- Magnetic and electrical properties of Fe-B-N amorphous films (invited)Journal of Applied Physics, 1985
- Magnetic and electrical properties ascribed to the heterogeneous structure of new amorphous Fe-B-O systemJournal of Applied Physics, 1985
- Planar inductorIEEE Transactions on Magnetics, 1984