Broad-beam multi-ampere metal ion source
- 1 January 1990
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 61 (1) , 577-579
- https://doi.org/10.1063/1.1141922
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- On the Current Intensity Limit of a Vacuum-Arc Ion SourceIEEE Transactions on Plasma Science, 1987
- Metal vapor vacuum arc ion sourceReview of Scientific Instruments, 1986
- The Metal Vapor Vacuum ARC (MEVVA) High Current Ion SourceIEEE Transactions on Nuclear Science, 1985
- High current ion sourceApplied Physics Letters, 1985
- Cathode spot erosion and ionization phenomena in the transition from vacuum to atmospheric pressure arcsJournal of Applied Physics, 1974
- Erosion and ionization in the cathode spot regions of vacuum arcsJournal of Applied Physics, 1973