Characteristics of silicon-micromachined gas sensors based on Pt/TiOx thin films
- 31 August 1997
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 42 (3) , 205-215
- https://doi.org/10.1016/s0925-4005(97)80337-1
Abstract
No abstract availableKeywords
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