Excimer laser micromachining and replication of 3D optical surfaces
- 1 May 1998
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 127-129, 911-914
- https://doi.org/10.1016/s0169-4332(97)00765-4
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Excimer laser machining for the fabrication of analogous microstructuresApplied Surface Science, 1996
- Fast three-dimensional laser micromachining of silicon for microsystemsSensors and Actuators A: Physical, 1996
- Combination of excimer laser micromachining and replication processes suited for large scale productionApplied Surface Science, 1995
- Excimer Laser Induced Mechanical and Electrical Nanostructures in PolymersMRS Proceedings, 1992