Effect of the post-deposition processing ambient on the preparation of superconducting YBa2Cu3O7−x coevaporated thin films using a BaF2 source
- 10 October 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (15) , 1443-1445
- https://doi.org/10.1063/1.100463
Abstract
We have investigated the effect of the post‐deposition processing ambient on the preparation of YBa2Cu3O7−x thin films from a BaF2 source. The role of H2O vapor during the high‐temperature anneal is understood through a thermodynamic analysis of the fluorine removal reaction. The role of a HF getter (e.g., SiO2) is understood through the same type of analysis. We have demonstrated that a zero resistance transition temperature at 77 K can be obtained for an annealing temperature as low as 690 °C for films deposited on SrTiO3 substrates by increasing the PH2O and decreasing PHF during the high‐temperature soak cycle.Keywords
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