Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets: Superconducting and structural properties

Abstract
High Tc superconducting Y‐Ba‐Cu‐O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y2O3, BaF2, and CuO powders. Transport measurements of the films showed a sharp resistive Tc (R=0) at 89 K and a metallic behavior of resistivity versus temperature. The films show preferred orientations when deposited on single‐crystal SrTiO3 substrates (100) or (110) and followed by a post O2 annealing at 825 °C.