Yields and energy distributions of sputtered semiconductor clusters

This publication has 25 references indexed in Scilit:

• The formation of clusters during ion induced sputtering of metals
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1996
• VUV photoionization of sputtered neutral silver clusters
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994
• Sputtering of neutral and ionic indium clusters
  Journal of Vacuum Science & Technology A, 1994
• Neutral copper cluster sputtering yields: Ne+ Ar+ and Xe+ bombardment
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994
• New findings on the sputtering of neutral metal clusters
  Surface Science, 1993
• Kinetic energy distributions of sputtered neutral aluminum clusters: A1-A16
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
• Yields and kinetic energy distributions of sputtered neutral copper clusters
  Surface Science, 1991
• Angular, energy, and mass distribution of sputtered particles
  Published by Springer Nature ,1991
• Secondary ion mass spectrometry (SIMS VI) : Wiley, Chichester, 1988 (ISBN 0-471-91832-6). xxvii + 1078 pp. Price £75.00
  Analytica Chimica Acta, 1988
• Mass distributions of copper, silver and gold clusters and electronic shell structure
  International Journal of Mass Spectrometry and Ion Processes, 1985