Beam-Plasma Type Metal Ion Source

Abstract
A metal ion source, whose operation is based on a beam-plasma type ion source, has been developed. Heating of a plasma production chamber (1160°C) and generation of axial magnetic field (0.029 T) were both achieved by DC current flow through a solenoid filament. A continuous ion current of 2–3 mA (Ag, Al, Sb, Mn, Pb) was extracted from a single aperture at a low extraction voltage of 5.2 kV; this was due to a high density plasma production by means of beam-plasma discharge and an ion extraction with ion space-charge compensation by beam electrons and high energy plasma electrons. For the case of silver ion beam, a silver ion current with a purity of 99.5% was extracted without a mass analyzer. Normalized emittance and normalized brightness were 1.9×10-8 m·rad and 1.1×1011A·rad-2·m-2, respectively.

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