Piezoresistive coefficients in silicon diffused layers
- 16 May 1973
- journal article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 17 (1) , K29-K31
- https://doi.org/10.1002/pssa.2210170147
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Self-compensating silicon load cell with an electronic converterIEEE Transactions on Electron Devices, 1969
- A silicon integrated circuit force sensorIEEE Transactions on Electron Devices, 1969
- Piezoresistance of Diffused Layers in Cubic SemiconductorsJournal of Applied Physics, 1963
- Piezoresistive Properties of Silicon Diffused LayersJournal of Applied Physics, 1963
- Silicon Diffused-Element Piezoresistive DiaphragmsJournal of Applied Physics, 1962
- Semiconducting Stress Transducers Utilizing the Transverse and Shear Piezoresistance EffectsJournal of Applied Physics, 1961