X-ray scattering study of Ag/Si(111) buried interface structures

Abstract
Various interface structures formed between Si(111) and a thick Ag overlayer are investigated by grazing-incidence x-ray diffraction. The (7×7) reconstruction of Si(111) is preserved under a room-temperature deposited Ag film. Upon annealing to 250 °C the interface becomes (1×1). This is contrasted by the (√3 × √3 )R30° structure formed by annealing a thin Ag film on Si(111). By depositing a thick Ag film on this (√3 × √3 )R30° Ag/Si(111) surface at room temperature, the (√3 × √3 )R30° reconstruction is suppressed.