Low loss mirrors for InP/InGaAsP waveguides
- 18 March 1993
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 29 (6) , 520-521
- https://doi.org/10.1049/el:19930347
Abstract
The loss associated with a mirror in an InP-based waveguide has been investigated. Mirror roughness and non-verticality were both significant sources of loss. Mirrors with only 1 dB loss have been produced through novel fabrication techniques.Keywords
This publication has 1 reference indexed in Scilit:
- Anisotropic reactive ion etching of InP in methane/hydrogen based plasmasJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991