Mechanisms and theory of physical sputtering by particle impact
- 1 June 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 27 (1) , 1-20
- https://doi.org/10.1016/0168-583x(87)90004-8
Abstract
No abstract availableThis publication has 259 references indexed in Scilit:
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