Effects of primary ion polyatomicity and kinetic energy on secondary ion yield and internal energy in sims
- 1 April 1990
- journal article
- Published by Elsevier in International Journal of Mass Spectrometry and Ion Processes
- Vol. 97 (1) , 35-45
- https://doi.org/10.1016/0168-1176(90)85038-4
Abstract
No abstract availableKeywords
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