Nitrogen ion implantation with energy scanning mode into Zr
- 1 August 1995
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 78 (3) , 1500-1503
- https://doi.org/10.1063/1.360240
Abstract
To study effects of ion implantation with the energy scanning mode on the surface structure and the depth profile, Zr samples were implanted with 15N2 ions, where ion energy was scanned in the range of 70–100 and 70–130 keV using a computer‐controlled power supply at an interval of 2 keV while monitoring the ion current of the sample. After the implantation of a total fluence of 3.5×1017 ions/cm2, the depth profiles of 15N2 ions in Zr were measured by nuclear reaction analysis of 15N(p,αγ)12C at 429 keV and the surface was observed by scanning electron microscopy. It was found that the implanted surface structure strongly depended on the implantation mode, and blistering induced by high fluence implantation of nitrogen could be completely avoided with the implantation mode of increasing energy gradually. The depth profiles were satisfactorily in agreement with the prediction by Monte Carlo simulation.This publication has 6 references indexed in Scilit:
- Thermal behaviour of nitrogen implanted into zirconiumSurface and Coatings Technology, 1994
- Behavior of nitrogen implanted into Zr at high fluenceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Characteristics of tool steel implanted with multi-energy B+ and single-energy N2+ ionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Computer simulation of dose effects on composition profiles under ion implantationJournal of Applied Physics, 1991
- High resolution depth profiling of F, Ne and Na in materialsNuclear Instruments and Methods in Physics Research, 1983
- Surface structure of silicon carbide irradiated with helium ions with monoenergy and continuous energy distributionsJournal of Applied Physics, 1982