Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum
- 1 May 1994
- journal article
- research article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 43 (1-3) , 269-275
- https://doi.org/10.1016/0924-4247(93)00699-5
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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