Abstract
The development of high‐resolution, grazing‐incidence soft x‐ray monochromators is discussed, and the performance of competing designs is reviewed in terms of efficiency, ultimate resolution, and order sorting. In particular, the characteristics of astigmatically corrected spherical grating monochromator systems (SGM) is examined. A new design is presented in which a variable angle premirror is used to eliminate the wavelength dependent image distance of the SGM and allows the use of order sorting ranges. The properties of a competing design using a plane variable angle premirror, plane grating, and spherical mirror combination are presented, and similarities between this and the corrected SGM are discussed. Flux and resolution data are presented for an undulator monochromator of this latter design.

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