Ta/sub 2/O/sub 5/ capacitors' dielectric material for giga-bit DRAMs
- 19 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 111-114
- https://doi.org/10.1109/iedm.1995.497194
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Promising storage capacitor structures with thin Ta/sub 2/O/sub 5/ film for low-power high-density DRAMsIEEE Transactions on Electron Devices, 1990