Simple method for the control of substrate ion fluxes using an unbalanced magnetron
- 1 January 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (1) , 145-147
- https://doi.org/10.1116/1.580962
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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