Micro fluid sensors and actuators

This publication has 34 references indexed in Scilit:

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  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• A Valve-less Planar Pump In Silicon
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• A novel fabrication method of capillary tubes on quartz for chemical analysis applications
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• Fluid density sensor based on resonance vibration
  Sensors and Actuators A: Physical, 1995
• A valve-less planar fluid pump with two pump chambers
  Sensors and Actuators A: Physical, 1995
• LIGA micropump for gases and liquids
  Sensors and Actuators A: Physical, 1994
• A valveless diffuser/nozzle-based fluid pump
  Sensors and Actuators A: Physical, 1993
• Polymer bonding of micro-machined silicon structures
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,1992
• The design and fabrication of a magnetically actuated micromachined flow valve
  Sensors and Actuators A: Physical, 1990
• Piezoelectric micropump with three valves working peristaltically
  Sensors and Actuators A: Physical, 1990