Formation and structure of tin-iron oxide thin film CO sensors
- 1 May 1994
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 9 (5) , 1250-1256
- https://doi.org/10.1557/jmr.1994.1250
Abstract
Rheotaxial growth and thermal oxidation (RGTO) for depositing thin films is a recognized technique in preparing gas sensitive semiconducting oxides. This paper presents a study performed by x-ray diffraction and scanning Auger microscopy of the mechanisms of growth and formation of the thin films of the new ternary compound Sn1−xFexOy with an iron content in the range O < x < 25 at. %. A structural model of this compound, which is found to be stable over a very large range of Sn/Fe ratios, can be derived by partially substituting Fe3+ ions in Sn4+ sites. This is an easy substitution in view of the similar values shown by the ionic radii (Fe3+ = 0.64 Å, Sn4+ = 0.71 Å) and the Pauling electronegativity (Fe3+ = 1.8, Sn4+ = 1.8) of these two ions. Experimental data, showing that this material is an excellent CO sensor, are reported.Keywords
This publication has 6 references indexed in Scilit:
- Methods for the preparation of NO, NO2 and H2 sensors based on tin oxide thin films, grown by means of the r.f. magnetron sputtering techniqueSensors and Actuators B: Chemical, 1992
- Classical and novel techniques for the preparation of SnO2 thin-film gas sensorsSensors and Actuators B: Chemical, 1992
- Bismuth-doped tin oxide thin-film gas sensorsSensors and Actuators B: Chemical, 1991
- A new technique for growing large surface area SnO2thin film (RGTO technique)Semiconductor Science and Technology, 1990
- Electrical studies on the reactions of CO with different oxygen species on SnO2 surfacesSurface Science, 1987
- A Model for the Operation of a Thin‐Film SnO x Conductance‐Modulation Carbon Monoxide SensorJournal of the Electrochemical Society, 1979