Transient Flat-Band Voltage Shifts Following High Voltage Stressing of Thin Oxides
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
It has been shown that the transient decay of the current after removal of a high voltage stressing pulse changed from an exponential RC time constant decay to a very long decay that had a 1/t time dependence[l]. During these long transients the flat-band voltages of the capacitors changed as the traps inside the oxides discharged. The discharge of both positive and negative changes near the silicon-oxide interface have been measured using QSCV measurements. In this paper the transient shifts in the flat-band voltages due to the discharging of stress generated traps in the oxide will be described.Keywords
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