Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry
- 1 March 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 73 (3) , 235-242
- https://doi.org/10.1016/s0924-4247(98)00240-4
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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